Microelectronic Applications of Chemical Mechanical Planarization

An authoritative, systematic, and comprehensive description of current CMP technology Chemical Mechanical Planarization (CMP) provides the greatest degree of planarization of any known technique. The current standard for integrated circuit (IC) pl...

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Böcker > Naturvetenskap & teknik > Teknik > Elektronik & kommunikationsteknik > Elektronik > Kretsar & komponenter