Ergashev, Abdurahamon Peculiarities of manufacturing of three-electrode temperature sensors: Three-electrode silicon structures for temperature sensors
![Ergashev, Abdurahamon Peculiarities of manufacturing of three-electrode temperature sensors: Three-electrode silicon structures for temperature sensors](https://r.kelkoo.com/resize.php?country=se&merchantId=100565793&categoryId=5101&trackingId=96964074&width=300&height=300&image=https%3A%2F%2Fm.media-amazon.com%2Fimages%2FI%2F41DVc7ZmTAL._SL500_.jpg&sign=UIuMDa7cSSCFBdzP0et1eG42rGGLbg_zErp9ztEh5ys-)
Peculiarities of manufacturing of three-electrode temperature sensors: Three-electrode silicon structures for temperature sensors